@inproceedings{CASE-2015-Kruif,
	author        = "Bas J. de Kruif",
	booktitle     = "{Proceedings of the 11th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2015.7294292",
	isbn          = "978-1-4673-8183-3",
	pages         = "1389--1394",
	publisher     = "{IEEE}",
	title         = "{Wet-etch sequence optimisation incorporating time dependent chemical maintenance}",
	year          = 2015,
}