@inproceedings{CASE-2015-PanZQ,
	author        = "ChunRong Pan and MengChu Zhou and Yan Qiao",
	booktitle     = "{Proceedings of the 11th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2015.7294260",
	isbn          = "978-1-4673-8183-3",
	pages         = "1194--1199",
	publisher     = "{IEEE}",
	title         = "{How to start-up dual-arm cluster tools involving a wafer revisiting process}",
	year          = 2015,
}