Phase correct routing for alternating phase shift masks
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Kevin W. McCullen
Phase correct routing for alternating phase shift masks
DAC, 2004.

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@inproceedings{DAC-2004-McCullen,
	author        = "Kevin W. McCullen",
	booktitle     = "{Proceedings of the 41st Design Automation Conference}",
	doi           = "10.1145/996566.996659",
	isbn          = "1-58113-828-8",
	pages         = "317--320",
	publisher     = "{ACM}",
	title         = "{Phase correct routing for alternating phase shift masks}",
	year          = 2004,
}


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