Tai-Chen Chen, Guang-Wan Liao, Yao-Wen Chang
Predictive formulae for OPC with applications to lithography-friendly routing
DAC, 2008.
@inproceedings{DAC-2008-ChenLC, author = "Tai-Chen Chen and Guang-Wan Liao and Yao-Wen Chang", booktitle = "{Proceedings of the 45th Design Automation Conference}", doi = "10.1145/1391469.1391599", isbn = "978-1-60558-115-6", pages = "510--515", publisher = "{ACM}", title = "{Predictive formulae for OPC with applications to lithography-friendly routing}", year = 2008, }