Dragoljub Gagi Drmanac, Frank Liu, Li-C. Wang
Predicting variability in nanoscale lithography processes
DAC, 2009.
@inproceedings{DAC-2009-DrmanacLW,
author = "Dragoljub Gagi Drmanac and Frank Liu and Li-C. Wang",
booktitle = "{Proceedings of the 46th Design Automation Conference}",
doi = "10.1145/1629911.1630053",
isbn = "978-1-60558-497-3",
pages = "545--550",
publisher = "{ACM}",
title = "{Predicting variability in nanoscale lithography processes}",
year = 2009,
}