Kanak Agarwal
Frequency domain decomposition of layouts for double dipole lithography
DAC, 2010.
@inproceedings{DAC-2010-Agarwal, author = "Kanak Agarwal", booktitle = "{Proceedings of the 47th Design Automation Conference}", doi = "10.1145/1837274.1837374", isbn = "978-1-4503-0002-5", pages = "404--407", publisher = "{ACM}", title = "{Frequency domain decomposition of layouts for double dipole lithography}", year = 2010, }