@inproceedings{CASE-2007-Pillai,
	author        = "Devadas Pillai",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341657",
	isbn          = "978-1-4244-1154-2",
	pages         = "98--None",
	publisher     = "{IEEE}",
	title         = "{Factory Automation as an Enabler in Leading-Edge Semiconductor Manufacturing}",
	year          = 2007,
}