@inproceedings{CASE-2009-ChenHB,
	author        = "Argon Chen and Sean Hsueh and Jakey Blue",
	booktitle     = "{Proceedings of the Fifth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2009.5234083",
	isbn          = "978-1-4244-4578-3",
	pages         = "439--442",
	publisher     = "{IEEE}",
	title         = "{Optimum sampling for track PEB CD Integrated Metrology}",
	year          = 2009,
}