BibSLEIGH corpus
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Used together with:
virtual (18)
develop (5)
sampl (4)
base (4)
run (4)

Stem metrolog$ (all stems)

26 papers:

CASECASE-2015-TiengYC #precise #tool support
Total precision inspection of machine tools with virtual metrology (HT, HCY, FTC), pp. 1446–1447.
CASECASE-2014-HuiM #assessment #performance #reduction
Performance assessment of virtual metrology in APC applications for the viability of sampling reductions (KH, JM), pp. 750–755.
CASECASE-2014-HungLHTC #development
Development of a private cloud-based new-generation virtual metrology system (MHH, YCL, HCH, CCT, FTC), pp. 910–915.
CASECASE-2013-KurzDP #monitoring #reliability
Monitoring virtual metrology reliability in a sampling decision system (DK, CDL, JP), pp. 20–25.
CASECASE-2013-PanahiASG #algorithm #performance #proximity
An efficient proximity probing algorithm for metrology (FP, AA, AFvdS, KG), pp. 342–349.
CASECASE-2013-SustoJOM #multi #predict #process
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes (GAS, ABJ, PGO, SFM), pp. 201–206.
SIGMODSIGMOD-2013-CurrimSSZJY #query
DBMS metrology: measuring query time (SC, RTS, YKS, RZ, MWJ, CY), pp. 421–432.
Virtual-metrology-based FDC scheme (YSH, FTC, HCY), pp. 80–85.
CASECASE-2012-KurzDP #using
Sampling Decision System in semiconductor manufacturing using Virtual Metrology (DK, CDL, JP), pp. 74–79.
CASECASE-2012-PampuriSSLBN #multi #process
Multistep virtual metrology approaches for semiconductor manufacturing processes (SP, AS, GAS, CDL, AB, GDN), pp. 91–96.
CASECASE-2012-SustoSPNB #approach
An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control (GAS, AS, SP, GDN, AB), pp. 358–363.
CASECASE-2011-KaoCW #case study
Preliminary study of run-to-run control utilizing virtual metrology with reliance index (CAK, FTC, WMW), pp. 256–261.
CASECASE-2011-PampuriSFN #multi
Multilevel Lasso applied to Virtual Metrology in semiconductor manufacturing (SP, AS, GF, GDN), pp. 244–249.
CASECASE-2010-HungHYC #automation #development #framework #industrial
Development of an automatic virtual metrology framework for TFT-LCD industry (MHH, HCH, HCY, FTC), pp. 879–884.
ICPRICPR-2010-PengHRYZ #orthogonal
Single View Metrology Along Orthogonal Directions (KP, LH, RR, XY, HZ), pp. 1658–1661.
Optimum sampling for track PEB CD Integrated Metrology (AC, SH, JB), pp. 439–442.
Advanced studies of selection schemes for dual virtual-metrology outputs (WMW, FTC, THL, DLZ, JFC, MHH), pp. 421–426.
CASECASE-2008-HuangHCLC #automation #design #implementation
Automatic virtual metrology system design and implementation (YTH, HCH, FTC, TSL, FCC), pp. 223–229.
Developing a selection scheme for dual virtual-metrology outputs (WMW, FTC, DLZ, THL, JFC), pp. 230–235.
ICPRICPR-2008-DengWWD #image #visual notation
Visual metrology with uncalibrated radial distorted images (XD, FW, YW, FD), pp. 1–4.
CASECASE-2007-ChengHK #development
Development of a Dual-Phase Virtual Metrology Scheme (FTC, HCH, CAK), pp. 270–275.
CASECASE-2007-HuangSCJ #development #framework
Development of a Generic Virtual Metrology Framework (HCH, YCS, FTC, JMJ), pp. 282–287.
CASECASE-2007-SuLCW #algorithm #implementation
Implementation Considerations of Various Virtual Metrology Algorithms (YCS, THL, FTC, WMW), pp. 276–281.
Uncalibrated Two-View Metrology (BL, ZC, NP), pp. 96–99.
ICPRICPR-v1-2002-MuralikrishnanNR #clustering #correlation #functional #novel #process
Process Mapping and Functional Correlation in Surface Metrology: A Novel Clustering Application (BM, KN, JR), pp. 29–32.
ICPRICPR-v2-2002-WangWH #approach #novel
A Novel Approach for Single View Based Plane Metrology (GW, YW, ZH), pp. 556–559.

Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.