@inproceedings{CASE-2011-JasperF,
	author        = "Daniel Jasper and Sergej Fatikow",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042434",
	isbn          = "978-1-4577-1730-7",
	pages         = "375--380",
	publisher     = "{IEEE}",
	title         = "{Fast focus-based depth detection for manipulation in scanning electron microscopes}",
	year          = 2011,
}