W. J. Guillaume, A. Kurylo
MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool
DAC, 1984.
@inproceedings{DAC-1984-GuillaumeK,
acmid = "800837",
author = "W. J. Guillaume and A. Kurylo",
booktitle = "{Proceedings of the 21st Design Automation Conference}",
isbn = "0-8186-0542-1",
pages = "452--453",
publisher = "{ACM/IEEE}",
title = "{MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool}",
year = 1984,
}











