MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool
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W. J. Guillaume, A. Kurylo
MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool
DAC, 1984.

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@inproceedings{DAC-1984-GuillaumeK,
	acmid         = "800837",
	author        = "W. J. Guillaume and A. Kurylo",
	booktitle     = "{Proceedings of the 21st Design Automation Conference}",
	isbn          = "0-8186-0542-1",
	pages         = "452--453",
	publisher     = "{ACM/IEEE}",
	title         = "{MINUPROX — an advanced proximity correction technique for the IBM EL-2 electron beam tool}",
	year          = 1984,
}

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