Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Rasit Onur Topaloglu
Self-aligned double patterning decomposition for overlay minimization and hot spot detection
DAC, 2011.
@inproceedings{DAC-2011-ZhangDWT, author = "Hongbo Zhang and Yuelin Du and Martin D. F. Wong and Rasit Onur Topaloglu", booktitle = "{Proceedings of the 48th Design Automation Conference}", doi = "10.1145/2024724.2024741", isbn = "978-1-4503-0636-2", pages = "71--76", publisher = "{ACM}", title = "{Self-aligned double patterning decomposition for overlay minimization and hot spot detection}", year = 2011, }