Jhih-Rong Gao, Xiaoqing Xu, Bei Yu, David Z. Pan
MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction
DAC, 2014.
@inproceedings{DAC-2014-GaoXYP, author = "Jhih-Rong Gao and Xiaoqing Xu and Bei Yu and David Z. Pan", booktitle = "{Proceedings of the 51st Annual Design Automation Conference}", doi = "10.1145/2593069.2593163", isbn = "978-1-4503-2730-5", pages = "6", publisher = "{ACM}", title = "{MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction}", year = 2014, }