Jhih-Rong Gao, Xiaoqing Xu, Bei Yu, David Z. Pan
MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction
DAC, 2014.
@inproceedings{DAC-2014-GaoXYP,
author = "Jhih-Rong Gao and Xiaoqing Xu and Bei Yu and David Z. Pan",
booktitle = "{Proceedings of the 51st Annual Design Automation Conference}",
doi = "10.1145/2593069.2593163",
isbn = "978-1-4503-2730-5",
pages = "6",
publisher = "{ACM}",
title = "{MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction}",
year = 2014,
}











