Yasmine Badr, Andres Torres, Puneet Gupta
Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias
DAC, 2015.
@inproceedings{DAC-2015-BadrTG, author = "Yasmine Badr and Andres Torres and Puneet Gupta", booktitle = "{Proceedings of the 52nd Annual Design Automation Conference}", doi = "10.1145/2744769.2744868", isbn = "978-1-4503-3520-1", pages = "6", publisher = "{ACM}", title = "{Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias}", year = 2015, }