Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias
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Yasmine Badr, Andres Torres, Puneet Gupta
Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias
DAC, 2015.

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@inproceedings{DAC-2015-BadrTG,
	author        = "Yasmine Badr and Andres Torres and Puneet Gupta",
	booktitle     = "{Proceedings of the 52nd Annual Design Automation Conference}",
	doi           = "10.1145/2744769.2744868",
	isbn          = "978-1-4503-3520-1",
	pages         = "6",
	publisher     = "{ACM}",
	title         = "{Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias}",
	year          = 2015,
}

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