Yasmine Badr, Andres Torres, Puneet Gupta
Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias
DAC, 2015.
@inproceedings{DAC-2015-BadrTG,
author = "Yasmine Badr and Andres Torres and Puneet Gupta",
booktitle = "{Proceedings of the 52nd Annual Design Automation Conference}",
doi = "10.1145/2744769.2744868",
isbn = "978-1-4503-3520-1",
pages = "6",
publisher = "{ACM}",
title = "{Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias}",
year = 2015,
}











