Jian Kuang, Wing-Kai Chow, Evangeline F. Y. Young
A robust approach for process variation aware mask optimization
DATE, 2015.
@inproceedings{DATE-2015-0001CY,
acmid = "2757180",
author = "Jian Kuang and Wing-Kai Chow and Evangeline F. Y. Young",
booktitle = "{Proceedings of the 19th Conference and Exhibition on Design, Automation and Test in Europe}",
isbn = "978-3-9815370-4-8",
pages = "1591--1594",
publisher = "{ACM}",
title = "{A robust approach for process variation aware mask optimization}",
year = 2015,
}