A robust approach for process variation aware mask optimization
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Jian Kuang, Wing-Kai Chow, Evangeline F. Y. Young
A robust approach for process variation aware mask optimization
DATE, 2015.

DATE 2015
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@inproceedings{DATE-2015-0001CY,
	acmid         = "2757180",
	author        = "Jian Kuang and Wing-Kai Chow and Evangeline F. Y. Young",
	booktitle     = "{Proceedings of the 19th Conference and Exhibition on Design, Automation and Test in Europe}",
	isbn          = "978-3-9815370-4-8",
	pages         = "1591--1594",
	publisher     = "{ACM}",
	title         = "{A robust approach for process variation aware mask optimization}",
	year          = 2015,
}

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