Travelled to:
1 × Taiwan
Collaborated with:
J.Mou
Talks about:
metrolog (1) virtual (1) perform (1) viabil (1) reduct (1) assess (1) applic (1) sampl (1) apc (1)
Person: Keung Hui
DBLP: Hui:Keung
Contributed to:
Wrote 1 papers:
- CASE-2014-HuiM #assessment #performance #reduction
- Performance assessment of virtual metrology in APC applications for the viability of sampling reductions (KH, JM), pp. 750–755.