Used together with:
wafer
(1)
inspect
(1)
drive
(1)
autom
(1)
actuat
(1)
Stem
comb$ (
all stems
)
1 papers:
CASE-2010-BeyelerMN
#automation
#testing
Wafer-level inspection system for the automated testing of comb drive based MEMS sensors and actuators (
FB
,
SM
,
BJN
), pp. 698–703.
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