Stem wafer$ (all stems)

35 papers:

CASE-2015-PanZQ #clustering #how #process #tool support

How to start-up dual-arm cluster tools involving a wafer revisiting process (CP, MZ, YQ), pp. 1194–1199.

CASE-2015-YuWZT #design

Controller design and optimal tuning of a wafer handling robot (XY, CW, YZ, MT), pp. 640–646.

CASE-2015-ZhuQZ #clustering #modelling #multi #petri net #scheduling #tool support

Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools (QZ, YQ, MZ), pp. 292–297.

MoDELS-2015-SandenRGBJVS #composition #design #modelling

Modular model-based supervisory controller design for wafer logistics in lithography machines (BvdS, MAR, MG, TB, JJ, JV, RRHS), pp. 416–425.

CASE-2014-HoussemanDRP #reduction

Smart dynamic sampling for wafer at risk reduction in semiconductor manufacturing (SH, SDP, GRV, JP), pp. 780–785.

CASE-2013-GrosbardKTR #composition #network #using

A queuing network model for wafer fabrication using decomposition without aggregation (DG, AK, IT, GR), pp. 717–722.

CASE-2013-JinM #algorithm #clustering #constraints #scheduling #tool support

Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints (HYJ, JRM), pp. 856–861.

CASE-2013-LiX #adaptation #learning

Off-line learning based adaptive dispatching rule for semiconductor wafer fabrication facility (LL, HX), pp. 1028–1033.

CASE-2013-QiaoWZ #clustering #scheduling #tool support

Scheduling of time constrained dual-arm cluster tools with wafer revisiting (YQ, NW, MZ), pp. 868–873.

CASE-2013-ZhuWQZ #clustering #modelling #multi #petri net #scheduling #tool support

Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools (QZ, NW, YQ, MZ), pp. 862–867.

DAC-2013-ZhangLSSR #automation #clustering

Automatic clustering of wafer spatial signatures (WZ, XL, SS, AJS, RAR), p. 6.

DATE-2013-GaoBW #paradigm #performance

A new paradigm for trading off yield, area and performance to enhance performance per wafer (YG, MAB, YW), pp. 1753–1758.

DATE-2013-HuangKCM #correlation #modelling #testing

Handling discontinuous effects in modeling spatial correlation of wafer-level analog/RF tests (KH, NK, JMCJ, YM), pp. 553–558.

CASE-2012-LiJJ #policy

A pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication (YL, ZJ, WJ), pp. 396–400.

CASE-2012-LiLS #constraints #process

Dispatching rule considering time-constraints on processes for semiconductor wafer fabrication facility (LL, YFL, ZJS), pp. 407–412.

CASE-2012-QiaoWZ #analysis #clustering #petri net #scheduling #tool support

Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting (YQ, NW, MZ), pp. 206–211.

CASE-2012-Rodriguez-VerjanTPDT

Dispatching of lots to dynamically reduce the wafers at risk in semiconductor manufacturing (GRV, ET, JP, SDP, AT), pp. 920–923.

CASE-2012-YumKK #analysis #bibliography #perspective

Analysis of defective patterns on wafers in semiconductor manufacturing: A bibliographical review (BJY, JHK, SJK), pp. 86–90.

CASE-2011-LeeL #clustering #concurrent #multi

Concurrent processing of multiple wafer types in a single-armed cluster tool (JHL, TEL), pp. 102–107.

CASE-2011-QiaoWZ #analysis #clustering #modelling #tool support

Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting (YQ, NW, MZ), pp. 90–95.

DATE-2011-DrmanacSWWA #multi #optimisation #parametricity #predict #testing

Multidimensional parametric test set optimization of wafer probe data for predicting in field failures and setting tighter test limits (DGD, NS, LW, LCW, MSA), pp. 794–799.

CASE-2010-BeyelerMN #automation #testing

Wafer-level inspection system for the automated testing of comb drive based MEMS sensors and actuators (FB, SM, BJN), pp. 698–703.

CASE-2009-WuCCZ #approach #clustering #novel #scheduling #tool support

A novel approach to scheduling of single-arm cluster tools with wafer revisiting (NW, FC, CC, MZ), pp. 567–572.

DAC-2009-ChengGSQH #modelling #variability

Physically justifiable die-level modeling of spatial variation in view of systematic across wafer variability (LC, PG, CJS, KQ, LH), pp. 104–109.

CASE-2008-Morrison #evolution

Flow lines with regular service times: Evolution of delay, state dependent failures and semiconductor wafer fabrication (JRM), pp. 247–252.

DATE-2008-BahukudumbiCK #scheduling

Test Scheduling for Wafer-Level Test-During-Burn-In of Core-Based SoCs (SB, KC, RK), pp. 1103–1106.

CASE-2007-GengJ #capacity #nondeterminism

Capacity Planning for Semiconductor Wafer Fabrication with Uncertain Demand and Capacity (NG, ZJ), pp. 100–105.

CASE-2007-HuangLF #scheduling

Lot Dispatching and Scheduling Integrating OHT Traffic Information in the 300mm Wafer Fab (HWH, CHL, LCF), pp. 495–500.

CASE-2007-MorrisonM #clustering #on the #throughput #tool support

On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss (JRM, MKM), pp. 88–93.

CASE-2007-ZhangG #approach

Calibration of Wafer Handling Robots: A Fixturing Approach (MTZ, KG), pp. 255–260.

CASE-2007-ZhangJ0 #multi #scheduling

Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System (HZ, ZJ, HH), pp. 213–218.

CASE-2006-WangQW #multi #optimisation #scheduling

Scheduling Semiconductor Wafer Fabrication with Optimization of Multiple objectives (ZW, FQ, QW), pp. 253–258.

DATE-2006-NelsonZDBPMB #fault

Extraction of defect density and size distributions from wafer sort test results (JEN, TZ, RD, JGB, NP, WM, RD(B), pp. 913–918.

CASE-2005-ChangLJ #detection #fault #network #using

Using a two-layer competitive Hopfield neural network for semiconductor wafer defect detection (CYC, SYL, MJ), pp. 301–306.

DAC-1991-WalkerKS #database #editing #process #representation #statistics

A Semiconductor Wafer Representation Database and Its Use in the PREDITOR Process Editor and Statistical Simulator (DMHW, CSK, AJS), pp. 579–584.