BibSLEIGH
BibSLEIGH corpus
BibSLEIGH tags
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challeng (1)
manufactur (1)
variat (1)
dummif (1)
awar (1)

Stem euv$ (all stems)

2 papers:

DACDAC-2015-ChangLF #challenge
EUV and e-beam manufacturability: challenges and solutions (YWC, RGL, SYF), p. 6.
DACDAC-2014-LiuCCJ
Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification (CYL, HJKC, YWC, JHRJ), p. 6.
Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.