@inproceedings{DAC-2015-ChangLF,
	author        = "Yao-Wen Chang and Ru-Gun Liu and Shao-Yun Fang",
	booktitle     = "{Proceedings of the 52nd Annual Design Automation Conference}",
	doi           = "10.1145/2744769.2747925",
	isbn          = "978-1-4503-3520-1",
	pages         = "6",
	publisher     = "{ACM}",
	title         = "{EUV and e-beam manufacturability: challenges and solutions}",
	year          = 2015,
}