@inproceedings{DAC-2014-LiuCCJ,
	author        = "Chi-Yuan Liu and Hui-Ju Katherine Chiang and Yao-Wen Chang and Jie-Hong R. Jiang",
	booktitle     = "{Proceedings of the 51st Annual Design Automation Conference}",
	doi           = "10.1145/2593069.2593215",
	isbn          = "978-1-4503-2730-5",
	pages         = "6",
	publisher     = "{ACM}",
	title         = "{Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification}",
	year          = 2014,
}