@inproceedings{CASE-2010-BeyelerMN,
	author        = "Felix Beyeler and Simon Muntwyler and Bradley J. Nelson",
	booktitle     = "{Proceedings of the Sixth International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2010.5584102",
	isbn          = "978-1-4244-5447-1",
	pages         = "698--703",
	publisher     = "{IEEE}",
	title         = "{Wafer-level inspection system for the automated testing of comb drive based MEMS sensors and actuators}",
	year          = 2010,
}