Optimization-based litho machine scheduling with multiple reticles and setups
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Bing Yan, Hsin Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang
Optimization-based litho machine scheduling with multiple reticles and setups
CASE, 2011.

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@inproceedings{CASE-2011-YanCLWC,
	author        = "Bing Yan and Hsin Yuan Chen and Peter B. Luh and Simon Wang and Joey Chang",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042516",
	isbn          = "978-1-4577-1730-7",
	pages         = "114--119",
	publisher     = "{IEEE}",
	title         = "{Optimization-based litho machine scheduling with multiple reticles and setups}",
	year          = 2011,
}

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