1 × Italy
1 × Korea
P.B.Luh S.Wang B.Yan H.Y.Chen Y.Kao S.Zhan S.Chang J.Ho P.Wang F.Wang
optim (3) schedul (2) reticl (2) machin (2) litho (2) base (2) constraint (1) multipl (1) furnac (1) balanc (1)
Person: Joey Chang
Wrote 3 papers:
- CASE-2012-YanCLWC #scheduling
- Optimization-based litho machine scheduling with load balancing and reticle expiration (BY, HYC, PBL, SW, JC), pp. 575–580.
- CASE-2011-KaoZCHWLWWC #constraints
- Near optimal furnace tool allocation with batching and waiting time constraints (YTK, SCZ, SCC, JHH, PW, PBL, SW, FW, JC), pp. 108–113.
- CASE-2011-YanCLWC #multi #scheduling
- Optimization-based litho machine scheduling with multiple reticles and setups (BY, HYC, PBL, SW, JC), pp. 114–119.