Stem reticl$ (all stems)

3 papers:

CASE-2012-YanCLWC #scheduling

Optimization-based litho machine scheduling with load balancing and reticle expiration (BY, HYC, PBL, SW, JC), pp. 575–580.

CASE-2011-YanCLWC #multi #scheduling

Optimization-based litho machine scheduling with multiple reticles and setups (BY, HYC, PBL, SW, JC), pp. 114–119.

DAC-2001-GrobmanTWYTD #challenge #design #physics

Reticle Enhancement Technology: Implications and Challenges for Physical Design (WG, MT, RW, CY, RT, ED), pp. 73–78.