Bing Yan, Hsin Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang
Optimization-based litho machine scheduling with load balancing and reticle expiration
CASE, 2012.
@inproceedings{CASE-2012-YanCLWC,
author = "Bing Yan and Hsin Yuan Chen and Peter B. Luh and Simon Wang and Joey Chang",
booktitle = "{Proceedings of the Eighth International Conference on Automation Science and Engineering}",
doi = "10.1109/CoASE.2012.6386493",
isbn = "978-1-4673-0429-0",
pages = "575--580",
publisher = "{IEEE}",
title = "{Optimization-based litho machine scheduling with load balancing and reticle expiration}",
year = 2012,
}











