Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
CASE, 2014.
@inproceedings{CASE-2014-YugmaBDV,
author = "Claude Yugma and Jakey Blue and Stéphane Dauzère-Pérès and Philippe Vialletelle",
booktitle = "{Proceedings of the 10th International Conference on Automation Science and Engineering}",
doi = "10.1109/CoASE.2014.6899310",
pages = "93--98",
publisher = "{IEEE}",
title = "{Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook}",
year = 2014,
}











