Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
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Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
CASE, 2014.

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@inproceedings{CASE-2014-YugmaBDV,
	author        = "Claude Yugma and Jakey Blue and Stéphane Dauzère-Pérès and Philippe Vialletelle",
	booktitle     = "{Proceedings of the 10th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CoASE.2014.6899310",
	pages         = "93--98",
	publisher     = "{IEEE}",
	title         = "{Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook}",
	year          = 2014,
}

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