Dong-Hyun Roh, Tae-Eog Lee
Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule
CASE, 2018.
@inproceedings{CASE-2018-RohL,
author = "Dong-Hyun Roh and Tae-Eog Lee",
booktitle = "{Proceedings of the 14th International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2018.8560521",
isbn = "978-1-5386-3593-3",
pages = "1562--1567",
publisher = "{IEEE}",
title = "{Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a $K$-Cyclic Schedule}",
year = 2018,
}











