F. R. Ashley, E. B. Murphy, H. J. Savard
An automated micro measurement system for integrated circuit masks
DAC, 1970.
@inproceedings{DAC-1970-AshleyMS,
author = "F. R. Ashley and E. B. Murphy and H. J. Savard",
booktitle = "{Proceedings of the Eighth Design Automation Workshop}",
doi = "10.1145/800160.805108",
pages = "17--27",
publisher = "{ACM}",
title = "{An automated micro measurement system for integrated circuit masks}",
year = 1970,
}