Use of lithography simulation for the calibration of equation-based design rule checks
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David Abercrombie, Fedor Pikus, Cosmin Cazan
Use of lithography simulation for the calibration of equation-based design rule checks
DAC, 2009.

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@inproceedings{DAC-2009-AbercrombiePC,
	author        = "David Abercrombie and Fedor Pikus and Cosmin Cazan",
	booktitle     = "{Proceedings of the 46th Design Automation Conference}",
	doi           = "10.1145/1629911.1629931",
	isbn          = "978-1-60558-497-3",
	pages         = "67--70",
	publisher     = "{ACM}",
	title         = "{Use of lithography simulation for the calibration of equation-based design rule checks}",
	year          = 2009,
}

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