David Abercrombie, Fedor Pikus, Cosmin Cazan
Use of lithography simulation for the calibration of equation-based design rule checks
DAC, 2009.
@inproceedings{DAC-2009-AbercrombiePC, author = "David Abercrombie and Fedor Pikus and Cosmin Cazan", booktitle = "{Proceedings of the 46th Design Automation Conference}", doi = "10.1145/1629911.1629931", isbn = "978-1-60558-497-3", pages = "67--70", publisher = "{ACM}", title = "{Use of lithography simulation for the calibration of equation-based design rule checks}", year = 2009, }