Travelled to:
1 × USA
Collaborated with:
D.Abercrombie F.Pikus
Talks about:
lithographi (1) design (1) calibr (1) simul (1) equat (1) check (1) rule (1) base (1) use (1)
Person: Cosmin Cazan
DBLP: Cazan:Cosmin
Contributed to:
Wrote 1 papers:
- DAC-2009-AbercrombiePC #design #equation #simulation #using
- Use of lithography simulation for the calibration of equation-based design rule checks (DA, FP, CC), pp. 67–70.