@inproceedings{DAC-2009-Zhu,
	author        = "Zhenhai Zhu",
	booktitle     = "{Proceedings of the 46th Design Automation Conference}",
	doi           = "10.1145/1629911.1630158",
	isbn          = "978-1-60558-497-3",
	pages         = "963--968",
	publisher     = "{ACM}",
	title         = "{A parameterized mask model for lithography simulation}",
	year          = 2009,
}