Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Rasit Onur Topaloglu
Self-aligned double patterning decomposition for overlay minimization and hot spot detection
DAC, 2011.
@inproceedings{DAC-2011-ZhangDWT,
author = "Hongbo Zhang and Yuelin Du and Martin D. F. Wong and Rasit Onur Topaloglu",
booktitle = "{Proceedings of the 48th Design Automation Conference}",
doi = "10.1145/2024724.2024741",
isbn = "978-1-4503-0636-2",
pages = "71--76",
publisher = "{ACM}",
title = "{Self-aligned double patterning decomposition for overlay minimization and hot spot detection}",
year = 2011,
}











