@inproceedings{CASE-2007-PopaLMDS,
	author        = "Dan O. Popa and Woo Ho Lee and Rakesh Murthy and Aditya N. Das and Harry E. Stephanou",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341718",
	isbn          = "978-1-4244-1154-2",
	pages         = "1099--1104",
	publisher     = "{IEEE}",
	title         = "{High Yield Automated MEMS Assembly}",
	year          = 2007,
}