Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System
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Huai Zhang, Zhibin Jiang, Hongtao Hu
Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System
CASE, 2007.

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@inproceedings{CASE-2007-ZhangJ0,
	author        = "Huai Zhang and Zhibin Jiang and Hongtao Hu",
	booktitle     = "{Proceedings of the Third International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2007.4341681",
	isbn          = "978-1-4244-1154-2",
	pages         = "213--218",
	publisher     = "{IEEE}",
	title         = "{Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System}",
	year          = 2007,
}

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