Dynamic Maintenance in semiconductor manufacturing using Bayesian networks
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Daniel Kurz, Johannes Kaspar, Jürgen Pilz
Dynamic Maintenance in semiconductor manufacturing using Bayesian networks
CASE, 2011.

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@inproceedings{CASE-2011-KurzKP,
	author        = "Daniel Kurz and Johannes Kaspar and Jürgen Pilz",
	booktitle     = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
	doi           = "10.1109/CASE.2011.6042404",
	isbn          = "978-1-4577-1730-7",
	pages         = "238--243",
	publisher     = "{IEEE}",
	title         = "{Dynamic Maintenance in semiconductor manufacturing using Bayesian networks}",
	year          = 2011,
}

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