Daniel Kurz, Johannes Kaspar, Jürgen Pilz
Dynamic Maintenance in semiconductor manufacturing using Bayesian networks
CASE, 2011.
@inproceedings{CASE-2011-KurzKP, author = "Daniel Kurz and Johannes Kaspar and Jürgen Pilz", booktitle = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}", doi = "10.1109/CASE.2011.6042404", isbn = "978-1-4577-1730-7", pages = "238--243", publisher = "{IEEE}", title = "{Dynamic Maintenance in semiconductor manufacturing using Bayesian networks}", year = 2011, }