Daniel Kurz, Johannes Kaspar, Jürgen Pilz
Dynamic Maintenance in semiconductor manufacturing using Bayesian networks
CASE, 2011.
@inproceedings{CASE-2011-KurzKP,
author = "Daniel Kurz and Johannes Kaspar and Jürgen Pilz",
booktitle = "{Proceedings of the Seventh International Conference on Automation Science and Engineering}",
doi = "10.1109/CASE.2011.6042404",
isbn = "978-1-4577-1730-7",
pages = "238--243",
publisher = "{IEEE}",
title = "{Dynamic Maintenance in semiconductor manufacturing using Bayesian networks}",
year = 2011,
}











