Gian Antonio Susto, Adrian B. Johnston, Paul G. O'Hara, Seán F. McLoone
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
CASE, 2013.
@inproceedings{CASE-2013-SustoJOM,
author = "Gian Antonio Susto and Adrian B. Johnston and Paul G. O'Hara and Seán F. McLoone",
booktitle = "{Proceedings of the Ninth International Conference on Automation Science and Engineering}",
doi = "10.1109/CoASE.2013.6653980",
pages = "201--206",
publisher = "{IEEE}",
title = "{Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes}",
year = 2013,
}