Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing
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Chen-Fu Chien, Peng-Chieh Lee, Runliang Dou, Ying-Jen Chen, Chia-Cheng Chen
Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing
CASE, 2017.

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@inproceedings{CASE-2017-ChienLDCC,
	author        = "Chen-Fu Chien and Peng-Chieh Lee and Runliang Dou and Ying-Jen Chen and Chia-Cheng Chen",
	booktitle     = "{Proceedings of the 13th International Conference on Automation Science and Engineering}",
	doi           = "10.1109/COASE.2017.8256192",
	isbn          = "978-1-5090-6781-7",
	pages         = "739--743",
	publisher     = "{IEEE}",
	title         = "{Modeling collinear WATs for parametric yield enhancement in semiconductor manufacturing}",
	year          = 2017,
}

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