Minho Lee, James R. Morrison, Adar A. Kalir, Kosta Rozen
On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events
CASE, 2017.
@inproceedings{CASE-2017-LeeMKR,
author = "Minho Lee and James R. Morrison and Adar A. Kalir and Kosta Rozen",
booktitle = "{Proceedings of the 13th International Conference on Automation Science and Engineering}",
doi = "10.1109/COASE.2017.8256191",
isbn = "978-1-5090-6781-7",
pages = "737--738",
publisher = "{IEEE}",
title = "{On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events}",
year = 2017,
}











