Minho Lee, James R. Morrison, Adar A. Kalir, Kosta Rozen
On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events
CASE, 2017.
@inproceedings{CASE-2017-LeeMKR, author = "Minho Lee and James R. Morrison and Adar A. Kalir and Kosta Rozen", booktitle = "{Proceedings of the 13th International Conference on Automation Science and Engineering}", doi = "10.1109/COASE.2017.8256191", isbn = "978-1-5090-6781-7", pages = "737--738", publisher = "{IEEE}", title = "{On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events}", year = 2017, }