David Abercrombie, Fedor Pikus, Cosmin Cazan
Use of lithography simulation for the calibration of equation-based design rule checks
DAC, 2009.
@inproceedings{DAC-2009-AbercrombiePC,
author = "David Abercrombie and Fedor Pikus and Cosmin Cazan",
booktitle = "{Proceedings of the 46th Design Automation Conference}",
doi = "10.1145/1629911.1629931",
isbn = "978-1-60558-497-3",
pages = "67--70",
publisher = "{ACM}",
title = "{Use of lithography simulation for the calibration of equation-based design rule checks}",
year = 2009,
}











