Flexible 2D layout decomposition framework for spacer-type double pattering lithography
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Yongchan Ban, Kevin Lucas, David Z. Pan
Flexible 2D layout decomposition framework for spacer-type double pattering lithography
DAC, 2011.

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@inproceedings{DAC-2011-BanLP,
	author        = "Yongchan Ban and Kevin Lucas and David Z. Pan",
	booktitle     = "{Proceedings of the 48th Design Automation Conference}",
	doi           = "10.1145/2024724.2024901",
	isbn          = "978-1-4503-0636-2",
	pages         = "789--794",
	publisher     = "{ACM}",
	title         = "{Flexible 2D layout decomposition framework for spacer-type double pattering lithography}",
	year          = 2011,
}

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