BibSLEIGH corpus
BibSLEIGH tags
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Open Knowledge
XHTML 1.0 W3C Rec
CSS 2.1 W3C CanRec
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Used together with:
lithographi (3)
doubl (3)
pattern (3)
rout (2)
detail (2)

Stem spacer$ (all stems)

5 papers:

DACDAC-2015-DingCM #self
Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography (YD, CCNC, WKM), p. 6.
DACDAC-2013-Du0SSLMW #self
Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography (YD, QM, HS, JS, GLP, AM, MDFW), p. 6.
DACDAC-2011-BanLP #2d #composition #flexibility #framework #layout
Flexible 2D layout decomposition framework for spacer-type double pattering lithography (YB, KL, DZP), pp. 789–794.
DACDAC-2009-JamaaLM #array #multi
Decoding nanowire arrays fabricated with the multi-spacer patterning technique (MHBJ, YL, GDM), pp. 77–82.
DACDAC-1987-XiongK #named #performance
Nutcracker: An Efficient and Intelligent Channel Spacer (XMX, ESK), pp. 298–304.

Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.