Shao-Yun Fang, Yao-Wen Chang
Simultaneous flare level and flare variation minimization with dummification in EUVL
DAC, 2012.
@inproceedings{DAC-2012-FangC, author = "Shao-Yun Fang and Yao-Wen Chang", booktitle = "{Proceedings of the 49th Annual Design Automation Conference}", doi = "10.1145/2228360.2228578", isbn = "978-1-4503-1199-1", pages = "1179--1184", publisher = "{ACM}", title = "{Simultaneous flare level and flare variation minimization with dummification in EUVL}", year = 2012, }