Shao-Yun Fang, Yao-Wen Chang
Simultaneous flare level and flare variation minimization with dummification in EUVL
DAC, 2012.
@inproceedings{DAC-2012-FangC,
author = "Shao-Yun Fang and Yao-Wen Chang",
booktitle = "{Proceedings of the 49th Annual Design Automation Conference}",
doi = "10.1145/2228360.2228578",
isbn = "978-1-4503-1199-1",
pages = "1179--1184",
publisher = "{ACM}",
title = "{Simultaneous flare level and flare variation minimization with dummification in EUVL}",
year = 2012,
}











