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Open Knowledge
XHTML 1.0 W3C Rec
CSS 2.1 W3C CanRec
email twitter
Travelled to:
4 × USA
Collaborated with:
Y.Chang I.Liu R.Liu W.Chen
Talks about:
lithographi (3) pattern (2) flare (2) rout (2) beam (2) awar (2) manufactur (1) decomposit (1) algorithm (1) simultan (1)

Person: Shao-Yun Fang

DBLP DBLP: Fang:Shao=Yun

Contributed to:

DAC 20152015
DAC 20142014
DAC 20132013
DAC 20122012

Wrote 5 papers:

DAC-2015-ChangLF #challenge
EUV and e-beam manufacturability: challenges and solutions (YWC, RGL, SYF), p. 6.
DAC-2014-LiuFC #process #self #using
Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process (IJL, SYF, YWC), p. 6.
DAC-2013-FangLC #multi
Stitch-aware routing for multiple e-beam lithography (SYF, IJL, YWC), p. 6.
Simultaneous flare level and flare variation minimization with dummification in EUVL (SYF, YWC), pp. 1179–1184.
DAC-2012-FangCC #algorithm #composition #layout #novel
A novel layout decomposition algorithm for triple patterning lithography (SYF, YWC, WYC), pp. 1185–1190.

Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.