Rani S. Ghaida, Puneet Gupta
Role of design in multiple patterning: technology development, design enablement and process control
DATE, 2013.
@inproceedings{DATE-2013-GhaidaG, acmid = "2485366", author = "Rani S. Ghaida and Puneet Gupta", booktitle = "{Proceedings of the 17th Conference on Design, Automation and Test in Europe}", isbn = "978-1-4503-2153-2", pages = "314--319", publisher = "{EDA Consortium San Jose, CA, USA / ACM DL}", title = "{Role of design in multiple patterning: technology development, design enablement and process control}", year = 2013, }