BibSLEIGH
BibSLEIGH corpus
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Used together with:
lithographi (1)
analysi (1)
yield (1)
base (1)
nanomet (1)

Stem linewidth$ (all stems)

1 papers:

DATEDATE-2009-SreedharK #analysis #on the
On linewidth-based yield analysis for nanometer lithography (AS, SK), pp. 381–386.

Bibliography of Software Language Engineering in Generated Hypertext (BibSLEIGH) is created and maintained by Dr. Vadim Zaytsev.
Hosted as a part of SLEBOK on GitHub.