Aswin Sreedhar, Sandip Kundu
On linewidth-based yield analysis for nanometer lithography
DATE, 2009.
@inproceedings{DATE-2009-SreedharK,
author = "Aswin Sreedhar and Sandip Kundu",
booktitle = "{Proceedings of the 13th Conference on Design, Automation and Test in Europe}",
pages = "381--386",
publisher = "{IEEE}",
title = "{On linewidth-based yield analysis for nanometer lithography}",
year = 2009,
}