Stem lithograph$ (all stems)

4 papers:

DAC-2012-GuoYSCZ #classification #distance #metric

Improved tangent space based distance metric for accurate lithographic hotspot classification (JG, FY, SS, CC, XZ), pp. 1173–1178.

DATE-2011-SreedharK #design #identification #on the #process

On design of test structures for lithographic process corner identification (AS, SK), pp. 800–805.

DATE-2011-SreedharK11a #security

Physically unclonable functions for embeded security based on lithographic variation (AS, SK), pp. 1632–1637.

DAC-2003-GuptaKSY #off the shelf #tool support

A cost-driven lithographic correction methodology based on off-the-shelf sizing tools (PG, ABK, DS, JY), pp. 16–21.