Aswin Sreedhar, Sandip Kundu
On design of test structures for lithographic process corner identification
DATE, 2011.
@inproceedings{DATE-2011-SreedharK,
author = "Aswin Sreedhar and Sandip Kundu",
booktitle = "{Proceedings of the 15th Conference on Design, Automation and Test in Europe}",
isbn = "978-1-61284-208-0",
pages = "800--805",
publisher = "{IEEE}",
title = "{On design of test structures for lithographic process corner identification}",
year = 2011,
}