Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, Jie Yang
A cost-driven lithographic correction methodology based on off-the-shelf sizing tools
DAC, 2003.
@inproceedings{DAC-2003-GuptaKSY,
author = "Puneet Gupta and Andrew B. Kahng and Dennis Sylvester and Jie Yang",
booktitle = "{Proceedings of the 40th Design Automation Conference}",
doi = "10.1145/775832.775840",
isbn = "1-58113-688-9",
pages = "16--21",
publisher = "{ACM}",
title = "{A cost-driven lithographic correction methodology based on off-the-shelf sizing tools}",
year = 2003,
}